Bouhadiche, A., et al. “Predictive Control of Surface Roughness As a Function of Temperature in a SiNx Thin Film Deposition Process Using the Kinetic Monte Carlo Method”. Acta Physica Polonica A ISSN 1898-794X , vol. 147, no. 4, May 2025, p. 333, https://doi.org/10.12693/APhysPolA.147.333.