A. Bouhadiche, S. Benghorieb, H. Bouridah, M. Beghoul, R. Remmouche, and H. Haoues, “Predictive Control of Surface Roughness as a Function of Temperature in a SiNx Thin Film Deposition Process Using the Kinetic Monte Carlo Method”, Acta Phys. Pol. A, vol. 147, no. 4, p. 333, May 2025, doi: 10.12693/APhysPolA.147.333.