Bouhadiche, A.; Benghorieb, S.; Bouridah, H.; Beghoul, M.; Remmouche, R.; Haoues, H. Predictive Control of Surface Roughness As a Function of Temperature in a SiNx Thin Film Deposition Process Using the Kinetic Monte Carlo Method. Acta Phys. Pol. A 2025, 147 (4), 333. https://doi.org/10.12693/APhysPolA.147.333.