Revenko, A.; Kidalov, V.; Duleba, D. .; Derhachov, M.; Redko, R.; Johnson, R. .; Aßmann, M.-A.; Gudymenko, O.; Sushko, O.; Koptiev, M. Experimental Analysis and Computational Modeling of Residual Stress in β-Ga2O3 Thin Films Grown on Si by RF Magnetron Sputtering. Acta Phys. Pol. A 2025, 148 (2), 158. https://doi.org/10.12693/APhysPolA.148.158.